Semiconductor Equipment Communication
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This project involved Development of SEMI standard compliant communication interface software, Communication and factory automation support for the equipment and Implementation of SECS-I, SECS-II and HSMS standards.
Customer
Leading Semiconductor Equipment Maker in Japan.
Business Situation
Semiconductor equipments had to be connected with the factory network.
Solution
Development of SEMI standard compliant communication interface software.
Details of the solution:
- Communication and factory automation support for the equipment
- Implementation of SECS-I, SECS-II and HSMS standards
- Enables integration of the equipment with the CIM enabled factory network
- Encapsulates the functionalities and complexities associated with handling communication and messaging standards conforming to the latest SEMI standards.
- Developed as a library linkable with existing equipment control software.
- Developed for 300 mm Semiconductor Wafer Processing Equipment - Allows easy customization
for other equipments
Benefits derived by the customer
- Open connectivity because of SEMI standard compliance
- Reusable library across different equipment models
- Well documented APIs enabling faster adaptation
- Supports RS-232 & TCP/IP
- Low total cost of ownership (TCO)
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